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Dec 05, 2025
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ME 626 - Introduction to Micro-Electromechanical Systems Credits: 3
MEMS (micro-electromechanical systems) adapt the fabrication techniques and materials of semiconductor IC (integrated circuits) chips to make mechanical components, like cantilever beams, hinges, micromotors, micromirrors and microfluidic chips. In this course, the fabrication, design, and application of MEMS will be covered. Students will gain the knowledge of MEMS that combines interdisciplinary subjects of mechanical, electrical, and chemical engineering and material sciences.
Note:
A student may take either ME 626 or ME 826 for credit, but not both.
Repeat for Credit
N
Typically Offered
Fall
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