IMSE 868 - Manufacturing Processes for Semiconductor Materials and Devices

Research topics on manufacturing processes for semiconductor materials and devices. Processes covered include; crystal growing, slicing, edge profiling, lapping, wafer grinding, wet etching, polishing, cleaning, oxidation, lithography, dry etching, diffusion, metallization, CMP (Chemical-Mechanical Planarization), backside thinning, dicing, bonding, packaging, final testing.

Credits: (3)

Note:
Three hours lecture a week.

Requisites:
Pr.: IMSE 250 and 563.

When Offered:
On sufficient demand

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Kansas State University

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IMSE 868 - Manufacturing Processes for Semiconductor Materials and Devices