Dec 05, 2025  
2022-2023 Undergraduate Catalog 
    
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2022-2023 Undergraduate Catalog [ARCHIVED CATALOG]

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ME 826 - Intermediate Micro-Electromechanical Systems

Credits: 3

MEMS (micro-electromechanical systems) adapt the fabrication techniques and materials of semiconductor IC (integrated circuits) chips to make mechanical components, like cantilever beams, hinges, micromotors, micromirrors and microfluidic chips. In this course, the fabrication, design, and application of MEMS will be covered. Students will gain the knowledge of MEMS that combines interdisciplinary subjects of mechanical, electrical, and chemical engineering and material sciences. Advanced applications of MEMS are covered.

Note
A student may take either ME 626 or ME 826 for credit, but not both.

Repeat for Credit
N

Typically Offered
Fall


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