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Dec 09, 2024
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IMSE 868 - Manufacturing Processes for Semiconductor Materials and DevicesCredits: 3
Research topics on manufacturing processes for semiconductor materials and devices. Processes covered include; crystal growing, slicing, edge profiling, lapping, wafer grinding, wet etching, polishing, cleaning, oxidation, lithography, dry etching, diffusion, metallization, CMP (Chemical-Mechanical Planarization), backside thinning, dicing, bonding, packaging, final testing.
Note: Three hours lecture a week.
Requisites: Prerequisite: IMSE 250 and IMSE 563.
Typically Offered On sufficient demand
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